Moire topography for three-dimensional profile measurement using the interference fringes of a laser

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Abstract
Resolution-variable moiré topography for measuring the three-dimensional profile of an object is described. With this method, moiré fringes are formed by projecting two sets of interference fringes of laser beams on an object. The interference fringes are formed using a Mach-Zehnder interferometer and are divided into two sets by a beamsplitter. The image, including the moiré fringes, which are formed in accordance with the object depth, is detected by an image sensor. The effectiveness of this method is demonstrated by practically measuring the profiles of a small object. The intervals between adjacent moiré fringes could be experimentally changed from 0.16 to 1.6 mm. The advantage ofthis method is that the interval between moiré fringes can be easily changed continuously by a mechanical operation.

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