Design and manufacturing of 10G GenX VCSELs at Emcore

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Abstract
In this paper, we present the design and manufacturing of next-generation 850 nm 10 Gb/s vertical-cavity surface-emitting lasers (GenX VCSELs). They were developed to provide a 10 Gb/s solution that meets Class-1 eye safety limits, IEEE 802.3ae standards, 10G Fiber Channel standards, and corresponding multisource agreement requirements for emerging low-cost, high-volume, and high-performance data communication applications in local and storage area networks (LANs and SANs). The paper covers GenX device designs, manufacturing processes, DC and AC characteristics, equivalent circuit models, recommended operating conditions, as well as reliability studies. As a simple drop-in replacement, we have successfully demonstrated that GenX VCSELs work well with all existing Emcore 10G transmitter optical sub-assembly (TOSA) products.

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