XPS, XANES and ToF-SIMS Characterization of Reactively Magnetron-sputtered Carbon Nitride Films

• 1 May 1997
• journal article
• research article
• Published by Wiley in Surface and Interface Analysis
• Vol. 25  (5) , 315-323
• https://doi.org/10.1002/(sici)1096-9918(199705)25:5<315::aid-sia238>3.0.co;2-s

Abstract

Keywords

• CARBON NITRIDE
• PVD
• HYBRIDIZATION
• AES
• XPS
• XANES
• TOF‐SIMS
• MAGNETRON‐SPUTTERED FILM