Simulation of scanning tunneling microscope interaction with resists

• 17 June 1996
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 68  (25) , 3653-3655
• https://doi.org/10.1063/1.115760

Abstract

Keywords

• STM
• LITHOGRAPHY
• FIELD EMISSION
• COMPUTERIZED SIMULATION
• DIELECTRIC MATERIALS
• SUBSTRATES
• ELECTRON BEAMS