High resolution x-ray photoemission spectroscopy studies of thin SiO2 and Si/SiO2 interfaces
- 1 July 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 11 (4) , 1528-1532
- https://doi.org/10.1116/1.586964
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: