Ultra-thin chip with permalloy film for high performance MS/RF CMOS

• 1 January 2004
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 220-221
• https://doi.org/10.1109/vlsit.2004.1345490

Abstract

Keywords

• RADIO FREQUENCY
• SUBSTRATES
• SEMICONDUCTOR FILMS
• NOISE FIGURE
• MAGNETIC FILMS
• MOS DEVICES
• MOSFETS
• PACKAGING
• NOISE MEASUREMENT
• FABRICATION