Study of the oxygen depletion in the film-substrate interface of superconducting YBa2Cu3O7−x films
- 16 December 1991
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (25) , 3327-3329
- https://doi.org/10.1063/1.106397
Abstract
Auger electron spectroscopy (AES) depth profiles were carried out on c‐axis oriented YBa2Cu3O7−x films grown in situ onto SrTiO3 (100) and polycrystalline yttria‐stabilized zirconia substrates. These films were grown by on‐axis single‐target dc planar magnetron sputtering, and they show zero resistance as high as 90.2 K and critical currents above 105 A/cm2 (77 K). The AES depth profiles reveal a clear oxygen loss at the interface. This oxygen deficiency corresponds to an atomic decrease from 7 to 6.6–6.3 per unit cell, in good agreement with the tetragonal structure oxygen composition. This confirms the oxygen‐deficient first stages of YBa2Cu3O7−x film growth on some usual cubic substrates, and that those first layers do not become fully oxidized after the oxygen intake on the cooling in O2 atmosphere.Keywords
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