Depth Distribution of Defects in Mg-Ion and Cd-Ion Implanted GaAs

• 1 February 1976
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 15  (2) , 405-406
• https://doi.org/10.1143/jjap.15.405

Abstract

Keywords

• DEPTH DISTRIBUTION
• MG ION
• IMPLANTED GAAS
• ION IMPLANTED
• DISTRIBUTION OF DEFECTS