Concentration Profiles of Room Temperature Ion Implanted Indium in Silicon
- 1 April 1971
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 10 (4)
- https://doi.org/10.1143/jjap.10.523
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Range measurements in oriented tungsten single crystals. III. The influence of temperature on the maximum rangeCanadian Journal of Physics, 1968