Study of Diffusion Barriers for PZT Deposited on Si for Non-Volatile Random-Access Memory Technology
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Advanced CeramicsScientific American, 1986
- Properties and microelectronic applications of thin films of refractory metal nitridesJournal of Vacuum Science & Technology A, 1985
- Plenum Press Handbooks of High-Temperature MaterialsPublished by Springer Nature ,1963