Surface-micromachined confocal scanning optical microscope
- 1 January 2000
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 447-448
- https://doi.org/10.1109/cleo.2000.907232
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Self-assembled microactuated XYZ stages for optical scanning and alignmentPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Silicon-micromachined scanning confocal optical microscopeJournal of Microelectromechanical Systems, 1998
- Micromachining for optical and optoelectronic systemsProceedings of the IEEE, 1997