Fast SiC Epitaxial Growth in a Chimney CVD Reactor and HTCVD Crystal Growth Developments
- 10 May 2000
- journal article
- Published by Trans Tech Publications, Ltd. in Materials Science Forum
- Vol. 338-342, 131-136
- https://doi.org/10.4028/www.scientific.net/msf.338-342.131
Abstract
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