Silicon-Etalon Fiber-Optic Temperature Sensor
- 13 February 1990
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- p. 504-511
- https://doi.org/10.1117/12.963069
Abstract
A temperature sensor is described which consists of a silicon etalon that is sputtered directly onto the end of an optical fiber. A two-layer protective cap structure is used to improve the sensor's long-term stability. The sensor's output is wavelength encoded to provide a high degree of immunity from cable and connector effects. This sensor is extremely compact and potentially inexpensive.Keywords
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