Tiefenprofilanalysen und TEM-Querschnitte von Tantalsilicid-Polysilicium-Doppelschichten
- 1 June 1984
- journal article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 319 (6-7) , 861-866
- https://doi.org/10.1007/bf01226791
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Characterization of thermal oxides grown on TaSi2/polysilicon filmsJournal of Vacuum Science & Technology B, 1985