Effect of primary ion energy and surface chemistry on the secondary ion yields in low-energy SIMS experiments

Publisher Website
Google Scholar
Abstract
The chemisorption of oxygen on W(100) and Mo(100) single-crystal surfaces was studied using a static mode SIMS technique at primary ion energies ranging from 150 eV to 2 keV. The following secondary ion yields O−, WO−2, and MoO−2 were found to be sensitive to the changes in the chemisorbed oxygen layer at different stages of chemisorption. Significant enhancement in the sensitivity of the O− yield to the chemisorption process was observed when the energy of the Ne+ primary ion energy was below 500 eV.

This publication has 0 references indexed in Scilit: