Damping of piezoresistive silicon accelerometers
- 30 April 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 32 (1-3) , 375-379
- https://doi.org/10.1016/0924-4247(92)80015-u
Abstract
No abstract availableKeywords
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- Squeeze-film damping in solid-state accelerometersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- A Study of Fluid Squeeze-Film DampingJournal of Basic Engineering, 1966
- Isothermal squeeze filmsQuarterly of Applied Mathematics, 1962