Optical properties of reactively sputtered Ta2O5 films
- 1 November 1982
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 21 (4) , 1043-1045
- https://doi.org/10.1116/1.571862
Abstract
The optical properties of reactively sputtered Ta2O5 thin films are investigated in the 0.25–2.5 μm wavelength range. The dispersion curves for the refraction and absorption indices are obtained from the reflectance and transmittance spectra. From the absorption data, one electronic transition at 4.07 eV and another about 4.5 eV are obtained. Finally, the optical transitions in Ta2O5 are discussed.Keywords
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