The microtron in X-ray lithography
- 1 April 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 24-25, 820-825
- https://doi.org/10.1016/s0168-583x(87)80256-2
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A 100-MeV Injector Race-Track Microtron for the Max Storage-Ring/Pulse-StretcherIEEE Transactions on Nuclear Science, 1983