Characterization of Spin -on Glasses by Microindentation.
- 1 January 1998
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Phase-Separated Inorganic-Organic Hybrids for Microelectronic ApplicationsMRS Bulletin, 1997
- Characterization of the Chemical‐Mechanical Polishing Process Based on Nanoindentation Measurement of Dielectric FilmsJournal of the Electrochemical Society, 1995
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992