Design rules and test of electrostatic micromotors made by the LIGA process
- 1 March 1994
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 4 (1) , 40-45
- https://doi.org/10.1088/0960-1317/4/1/006
Abstract
Electrostatic stepping micromotors have been designed with regard to low rotor friction on the axle. The design rules are determined using two-dimensional FEM calculations and taking into consideration the particular rotor position during motion. The motors are fabricated by a fully integrated LIGA process. The minimum driving voltages needed are measured to be about 60 V. Determination of the coefficients of friction in operation completes the rules for future designs.Keywords
This publication has 3 references indexed in Scilit:
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