Volatility by Design. Synthesis and Characterization of Polyether Adducts of Bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)barium and Their Implementation as Metal−Organic Chemical Vapor Deposition Precursors
- 1 July 1997
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 9 (7) , 1638-1648
- https://doi.org/10.1021/cm9700108
Abstract
No abstract availableKeywords
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