Some considerations of the limitations of the Auger-depth-profiling technique as applied to silver metal and (100) surfaces of indium phosphide
- 14 June 1979
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 12 (6) , 837-844
- https://doi.org/10.1088/0022-3727/12/6/008
Abstract
A study has been made of the way an electron beam can alter the surface composition of silver metal and (100) indium phosphide during the course of an Auger-profiling experiment. The interaction between electron beam and material has been examined for various conditions of the metal and semiconductor surface. Distinct differences in behaviour have been found to exist between a beam of electrons impinging upon a contaminated surface and a similar beam incident upon a clean surface.Keywords
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