Tensile Testing of Polycrystalline Silicon Thin Films Using Electrostatic Force Grip.
- 1 January 1996
- journal article
- Published by Institute of Electrical Engineers of Japan (IEE Japan) in IEEJ Transactions on Sensors and Micromachines
- Vol. 116 (10) , 441-446
- https://doi.org/10.1541/ieejsmas.116.441
Abstract
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