A new machine for film formation by ion and vapour deposition
- 1 January 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 6 (1-2) , 111-115
- https://doi.org/10.1016/0168-583x(85)90618-4
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Formation of Cubic Boron Nitride Films by Boron Evaporation and Nitrogen Ion Beam BombardmentJapanese Journal of Applied Physics, 1983