Fabrication and Characterization of Cross-Edge-Structured Vertical Field Emitter Arrays
- 1 December 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (12S)
- https://doi.org/10.1143/jjap.33.7171
Abstract
New field emitter arrays (FEAs), called cross-edge-structured vertical FEAs, were fabricated and characterized. Chromium (Cr) emitters and molybdenum/Cr emitters were tested. The anode-current fraction was 50%, being improved in comparison with that of disk-edge FEAs. Threshold voltage of the anode current was a low voltage of 25 V. From the light emission pattern, divergent angle was estimated to be 9°.Keywords
This publication has 3 references indexed in Scilit:
- Vacuum microelectronics-1992Journal of Micromechanics and Microengineering, 1992
- Physical properties of thin-film field emission cathodes with molybdenum conesJournal of Applied Physics, 1976
- Electron emission in intense electric fieldsProceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character, 1928