Fabrication of LiTaO3 Optical Waveguide by H+ Exchange Method

Abstract
LiTaO3 is a promising material for optical devices because of its resistance against optical damage. In this work we have successfully fabricated waveguides on z-cut LiTaO3 wafers by the proton exchange method and have propagated several modes in them. Both the increment of the refractive index and the `exchange coefficient' were determined optically. The effect of an annealing process was also studied. The propagation loss was measured to be 1 dB/cm.

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