Transient Species Induced in X-ray Chemically Amplified Positive Resists: Post-Exposure Delay Effect.
Open Access
- 1 January 1996
- journal article
- Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
- Vol. 9 (4) , 619-626
- https://doi.org/10.2494/photopolymer.9.619
Abstract
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