Absolute Calibration Of An Optical Flat
- 1 August 1984
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 23 (4) , 234379-234379-
- https://doi.org/10.1117/12.7973304
Abstract
A method for the absolute calibration of a flat optical surface is described. An algorithm which utilizes the orthogonal properties of the Zernike polynomials was used on interferometric data to fabricate and certify three 10-inch Zerodur reference flats to X/100 peak-to-valley quality.Keywords
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