Analysis of Low-Energy Sputtering
- 1 July 1958
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 111 (1) , 91-97
- https://doi.org/10.1103/physrev.111.91
Abstract
It is postulated that for low-energy sputtering the interatomic energy and distance relation can be represented by a Morse curve, and that the energy transfer in the lattice proceeds essentially by two-particle (i.e., binary) collisions.Keywords
This publication has 2 references indexed in Scilit:
- New Collision Theory of Cathode Sputtering of Metals at Low Ion EnergiesPhysical Review B, 1957
- Threshold Energies for Sputtering and the Sound Velocity in MetalsPhysical Review B, 1954