1-3 MeV B+and P+Implants for C-Mos Technology

Publisher Website

1 January 1985

journal article
Published by Springer Nature in MRS Proceedings

Vol. 45
https://doi.org/10.1557/proc-45-115

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

High energy ion implantation
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
Ion Implantation Range and Energy Deposition Distributions
Published by Springer Nature ,1975