Tritertiarybutylaluminum as an organometallic source for epitaxial growth of AlGaSb

• 4 September 1995
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 67  (10) , 1384-1386
• https://doi.org/10.1063/1.115541

Abstract

Keywords

• ALUMINIUM ANTIMONIDES
• CHEMICAL COMPOSITION
• CONTAMINATION
• FILM GROWTH
• GALLIUM ANTIMONIDES
• MORPHOLOGY
• PHOTOLUMINESCENCE
• VPE