Characterization of the surface layer of various metals implanted with nitrogen
- 31 August 1994
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 66 (1-3) , 250-254
- https://doi.org/10.1016/0257-8972(94)90006-x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- RBS, AES and XRD investigations of high-dose nitrogen-implanted Ti, Cr, Fe, Zr and Nb sheetsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
- Surface Silicon Crystallinity and Anomalous Composition Profiles of Buried SiO2 and Si3N4 Layers Fabricated by Oxygen and Nitrogen Implantation in SiliconJapanese Journal of Applied Physics, 1982
- On the stable compositions in transition metal-nitrogen phase diagramsJournal of the Less Common Metals, 1979
- Tables of stopping cross sections for 4He ions in solidsJournal of Applied Physics, 1976
- Empirical corrections to the energy loss of 4He ions in oxidesApplied Physics Letters, 1975