Ti-W-alloy interaction with polycrystalline silicon

• 1 July 1986
• journal article
• abstracts
• Published by Elsevier in Vacuum
• Vol. 36  (7-9) , 561
• https://doi.org/10.1016/0042-207x(86)90250-2

Abstract

Keywords

• POLYCRYSTALLINE SILICON
• INTERACTION WITH POLYCRYSTALLINE
• TI W ALLOY INTERACTION