Resists in Microlithography

• 5 May 1989
• book chapter
• Published by American Chemical Society (ACS)
• p. 325-376
• https://doi.org/10.1021/ba-1989-0221.ch007

Abstract

Keywords

• CHAPTER
• CIRCUIT
• SCHEMES
• HOLD
• MICROLITHOGRAPHY
• RESOLUTION
• MICROLITHOGRAPHIC
• MICROELECTRONIC
• EMPHASIS