Investigation of 3C-SiC Epitaxial Layers Grown by Sublimation Epitaxy

• 10 May 2000
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 338-342, 221-224
• https://doi.org/10.4028/www.scientific.net/msf.338-342.221

Abstract

Keywords

• CARBON VACANCY
• DEEP CENTERS
• DLTS
• PROTON IRRADIATION
• SUBLIMATION HETEROPOLYTYPE EPITAXY
• X-RAY TOPOGRAPHY