Photo-induced metastable states in silicon nitride amorphous layers
- 16 November 1989
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 116 (1) , K105-K109
- https://doi.org/10.1002/pssa.2211160166
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Effect of hydrogen on photoluminescence spectra of silicon nitride amorphous filmsPhysica Status Solidi (a), 1986
- Effect of high-temperature annealing on PL spectra of silicon nitridePhysica Status Solidi (a), 1985
- Dangling Bonds in Memory‐Quality Silicon Nitride FilmsJournal of the Electrochemical Society, 1985