Microstructures of diamond films deposited on (100) silicon wafer by microwave plasma-enhanced chemical vapour deposition
- 15 February 1992
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 27 (23) , 6324-6330
- https://doi.org/10.1007/bf00576280
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Diamond—Ceramic Coating of the FutureJournal of the American Ceramic Society, 1989
- Synthesis of diamonds by use of microwave plasma chemical-vapor deposition: Morphology and growth of diamond filmsPhysical Review B, 1988
- Development of textures during the growth of silver films condensed in vacuum on glassThin Solid Films, 1985
- Growth of diamond particles from methane-hydrogen gasJournal of Materials Science, 1982
- Vapor growth of diamond on diamond and other surfacesJournal of Crystal Growth, 1981