Thermodynamic Approach to the Deposition of Nonstoichiometric Solids from the Gas Phase: Example of Titanium Carbide at High Temperature
- 1 July 1981
- journal article
- research article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 128 (7) , 1584-1587
- https://doi.org/10.1149/1.2127687
Abstract
A thermodynamic approach based on the minimization of the Gibbs free energy is used to calculate the pressure‐temperature‐composition ranges of stability of various solid phases in multicomponent gas‐solid systems including nonstoichiometric solid phases. The conditions for the chemical vapor deposition of nonstoichiometric titanium carbide from at high temperature are given. The influence of nonstoichiometry and uncertainties of the thermodynamic data on the deposition domains of the various solids are pointed out. The relationships between the composition of the gaseous phase and the composition of the solid are also discussed.Keywords
This publication has 0 references indexed in Scilit: