The fabrication of multilayers for soft X-rays and extreme ultra-violet mirrors
- 1 September 1984
- journal article
- Published by IOP Publishing in Journal of Optics
- Vol. 15 (4B) , 265-269
- https://doi.org/10.1088/0150-536x/15/4b/306
Abstract
We describe a vacuum deposition system with in situ monitoring of the soft X-ray reflectivity (3 to 7 nm) for the thickness control of very thin films. We discuss the performances of this system used for the fabrication of multilayers for soft X-rays and extreme U-V mirrors. We present some results of geometrical and optical measurements on two types of multilayer coatings (W-Re/C and W-Re/Si) optimised respectively for about 5 and 30 nm.Keywords
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