Measurement of the Dielectric Constant and Loss Tangent of Multilayer Specimen and Its Application

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Abstract
This paper describes a measuring technique for the dielectric constant and loss tangent of multilayer specimens at above 1 MHz by the apparatus devised for the varying gap immersion method. The method permits the measurement of a dielectric film formed on a substrate. Specimens that cannot be immersed directly in a liquid can be placed in a pouch. Since the method does not require conventional micrometer measurements of thickness of the specimen, the substrate, and the pouch, it improves the accuracy of the measurements. By this method, a whole measurement of a specimen can be done in several minutes with an accuracy of 0.5% and 5% for the dielectric constant and the loss tangent, respectively, of a low‐loss specimen of polymeric film several hundred microns thick. The thickness of the specimen can also be calculated from the measured data to within 1 μ.

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