Electrostatically Force-Balanced Silicon Accelerometer

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Abstract
A low-cost silicon accelerometer intended for use in tactical missile and multisensor applications is presented. The proof mass, flexure, and frame structure are anisotropically etched from single-crystal silicon using semiconductor batch processing to yield 109 devices per wafer. This small, rugged accelerometer has inherently high gas damping, which is used to eliminate structural resonances. The accelerometer chips have been assembled into triad housings, along with hybrid preamp electronics, for testing. Test data on 10 g full-scale devices is presented; 100 g range accelerometers are being developed.

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