Quantitative EELS by Spectrum Parametrization

Abstract
In order to describe the profiles of electron energy loss spectra in transmission electron microscopy, an analytical form of the intensity has been established taking the various elementary diffusion processes into account. This procedure is used to evaluate the background profile in each part of the spectra, even for thick samples. Simple diffusion models carl then be established from experimental spectra and the application area of quantitative elementary chemical analysis can hence be extended.