Gettering of Copper in Silicon‐on‐Insulator Structures Formed by Oxygen Ion Implantation
- 1 August 1987
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 134 (8) , 2027-2030
- https://doi.org/10.1149/1.2100812
Abstract
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