Waveguide effect during photoetching of semiconductors

• 31 March 1984
• journal article
• Published by IOP Publishing in Soviet Journal of Quantum Electronics
• Vol. 14  (3) , 301-302
• https://doi.org/10.1070/qe1984v014n03abeh004885

Abstract

Keywords

• WAVEGUIDE EFFECT DURING PHOTOETCHING
• EFFECT DURING PHOTOETCHING OF SEMICONDUCTORS