Abstract
Absolute values of inner-shell ionization cross sections have been obtained by electron impact using Auger-electron spectroscopy with gaseous samples. Values of the L2,3-shell cross sections of Si, P, S, Cl, and Ti and the M4,5-shell cross sections of Br and Sn are reported for incident-electron energies between 500 and 2500 eV. The corrections due to a hole redistribution by Coster-Kronig transitions are discussed.