Sputter etching studies of Fe–Ni and Fe–Pd films

• 1 March 1979
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 16  (2) , 774-777
• https://doi.org/10.1116/1.570083

Abstract

Keywords

• PD FILMS
• SPUTTER ETCHING
• ETCHING STUDIES
• NI AND FE
• STUDIES OF FE