Some cerium .beta.-diketonate derivatives as MOCVD precursors

• 1 January 1993
• journal article
• Published by American Chemical Society (ACS) in Chemistry of Materials
• Vol. 5  (1) , 137-144
• https://doi.org/10.1021/cm00025a026

Abstract

Keywords

• THERMAL ANALYSIS
• X RAY DIFFRACTION
• MASS SPECTROSCOPY
• MASS SPECTROMETRY
• INFRARED SPECTROSCOPY
• ANALYTICAL CHEMISTRY