Self-aligned planar technology for GaAs integrated circuits

• 1 January 1977
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• https://doi.org/10.1109/iedm.1977.189205

Abstract

Keywords

• ION IMPLANTATION
• INTEGRATED CIRCUIT
• GALLIUM ARSENIDE
• DIELECTRIC MATERIALS
• FIGURE OF MERIT