Formation of TiN phase in SiO2 and Si through ion implantation of constituent elements
- 29 February 1992
- journal article
- Published by Elsevier in Materials Letters
- Vol. 13 (1) , 35-39
- https://doi.org/10.1016/0167-577x(92)90174-i
Abstract
No abstract availableKeywords
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- Carbon-induced amorphous surface layers in Ti-implanted FeApplied Physics Letters, 1980
- Thermodynamic Studies of High Temperature Equilibria. III. SOLGAS, a Computer Program for Calculating the Composition and Heat Condition of an Equilibrium Mixture.Acta Chemica Scandinavica, 1971