Changes in surface area and composition during grinding of silicon in environments of various quality
- 1 November 1995
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 10 (11) , 2728-2735
- https://doi.org/10.1557/jmr.1995.2728
Abstract
Changes in particle size, surface properties, and composition brought about by planetary grinding of silicon in air and various permittivity liquids were investigated. Using a variety of spectroscopic techniques (ESR, IRS, and XPS), a mechanically induced surface oxidation was proved. While at grinding in air and organic liquids a part of the centers originating from dangling orbitals on SiIII are preserved, the properties of water-ground silicon are fully governed by the oxide surface shell. The most effective particle size reduction and surface protection can be reached by grinding in nonpolar liquids.Keywords
This publication has 21 references indexed in Scilit:
- Photoemission study of the SiO2/Si interface structure of thin oxide film on vicinal Si(100) surfaceJournal of Vacuum Science & Technology A, 1992
- Structural Analysis by Infrared and X‐Ray Photoelectron Spectroscopy of Amorphous Silicon Produced by Plasma‐DepositionJournal of the Electrochemical Society, 1990
- Oxidation of silicon by waterJournal of the European Ceramic Society, 1989
- Microscopic structure of the/Si interfacePhysical Review B, 1988
- Calculations of electron inelastic mean free paths for 31 materialsSurface and Interface Analysis, 1988
- X-ray photoelectron spectroscopy of thermally grown silicon dioxide films on siliconChemical Physics Letters, 1975
- High-Resolution X-Ray Photoemission Spectrum of the Valence Bands of GoldPhysical Review B, 1972
- Study of Silicon-Silicon Dioxide Structure by Electron Spin Resonance IJapanese Journal of Applied Physics, 1971
- Electron Paramagnetic Resonance from Clean Single-Crystal Cleavage Surfaces of SiliconPhysical Review B, 1968
- Adsorption of Gases in Multimolecular LayersJournal of the American Chemical Society, 1938